Pattern writing system and pattern writing method

Details Pattern writing system and pattern writing method Pattern writing system and pattern writing method

2004-04-09

2010-02-16

Lee, Diane I (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C359S619000

Reexamination Certificate

active

07663734

ABSTRACT:
In a pattern writing method for writing a pattern on a substrate by the use of projection patterns output from a mirror device including two-dimensionally arranged micromirrors, exposure is implemented by ON/OFF controlling each micromirror and partly overlapping the projection patterns from the mirror device at least in a one-dimensional direction, thereby accurately controlling the exposure of intermediate amounts of light.

REFERENCES:
patent: 5691541 (1997-11-01), Ceglio et al.
patent: 5894341 (1999-04-01), Nishi et al.
patent: 6020950 (2000-02-01), Shiraishi
patent: 6049555 (2000-04-01), Ohtsuka et al.
patent: 6229639 (2001-05-01), Ozarski
patent: 6233035 (2001-05-01), Toshiyuki et al.
patent: 6285488 (2001-09-01), Sandstrom
patent: 6379867 (2002-04-01), Mei et al.
patent: 6428940 (2002-08-01), Sandstrom
patent: 6486938 (2002-11-01), Morita
patent: 6552308 (2003-04-01), Nishimura
patent: 6816302 (2004-11-01), Sandstrom
patent: 7009753 (2006-03-01), Sandstrom
patent: 7034986 (2006-04-01), Sandstrom
patent: 7184192 (2007-02-01), Sandstrom
patent: 2002/0097495 (2002-07-01), Mei
patent: 2003/0001798 (2003-01-01), Okuyama
patent: 2003/0002040 (2003-01-01), MacAulay et al.
patent: 2003/0027367 (2003-02-01), Watkins et al.
patent: 2003/0214644 (2003-11-01), Shirota
patent: 2008/0079922 (2008-04-01), Sandstrom
patent: 62-21220 (1987-01-01), None
patent: 05-234846 (1993-09-01), None
patent: 09-022120 (1997-01-01), None
patent: 10-326737 (1998-12-01), None
patent: 2000-003856 (2000-01-01), None
patent: 2001-013297 (2001-01-01), None
patent: 2001-133893 (2001-05-01), None
patent: 2002-083756 (2002-03-01), None
patent: 2002-124451 (2002-04-01), None
patent: 2002-520837 (2002-07-01), None
patent: 2002-353095 (2002-12-01), None
patent: 2002-372790 (2002-12-01), None
patent: 2003-015309 (2003-01-01), None
patent: 2003-332221 (2003-11-01), None
patent: WO 97/43770 (1997-11-01), None
patent: WO 02/41196 (2002-05-01), None

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