Partial coherence varier for microlithographic system

Details Partial coherence varier for microlithographic system Partial coherence varier for microlithographic system

1992-11-24

1995-01-17

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 70, 355 71, G03B 2754

Patent

active

053830008

ABSTRACT:
A microlithographic projection imaging system has an illuminator optical system and an objective imaging system, and an adjustable profiler or energy distributor in the illuminator optical system varies the numerical aperture of the illuminator, for varying the partial coherence of the projection imager. The adjustable profiler can be a diffuser, a binary optic, a hologram, or a fly's eye lens that is axially movable in a non-collimated region of the illumination path for imposing a predetermined angular profile on each of a multitude of fragments of the illumination. This changes the distribution of the illumination energy at the pupil of the illuminator and thus varies the numerical aperture and the angular energy profile of the illumination arriving at the objective imaging system, which is also preferably made uniform in spatial intensity by a uniformizer in the illuminator upstream of the pupil.

REFERENCES:
patent: 4851882 (1989-07-01), Takahashi et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5014086 (1991-05-01), Barry
patent: 5245384 (1993-09-01), Mori

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