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Facetted reflector

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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Fast model-based optical proximity correction

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Film pressing device

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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Filter for projection photolithographic system

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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Filter window, lithographic projection apparatus, filter...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Flash exposure system

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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Flash illumination apparatus

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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Fluorescence radiation filter

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Flying image of a maskless exposure system

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Frame structure for turbulence control in immersion lithography

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Full frame flash illumination system utilizing a diffuse integra

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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Full-frame illumination system for a document reproduction devic

Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent

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