Patterned grid element polarizer

Details Patterned grid element polarizer Patterned grid element polarizer

2007-12-04

2007-12-04

Amari, Alessandro (Department: 2872)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C359S352000, C359S486010

Reexamination Certificate

active

10813168

ABSTRACT:
The invention relates to a patterned grid polarizer for use in lithography, comprising a substrate that is transparent to ultraviolet (UV) light; and an array of elements patterned on the substrate, wherein the elements polarize UV light. The array of elements can be patterned to produce tangentially or radially polarized UV light.

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