Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-08-17
2009-06-02
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
07542129
ABSTRACT:
An apparatus for patterning a workpiece may include at least two spatial light modulators. The at least two spatial light modulators may receive and relay electromagnetic radiation from an electromagnetic radiation source toward a workpiece. The electromagnetic radiation may be split into at least two beams in an optical plane between the at least two spatial light modulators and at least one of an illuminator pupil and a conjugate optical plane. Each of the at least two spatial light modulators may receive a corresponding one of the at least two beams.
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English-language translation of Chinese Office Action dated Mar. 21, 2008 for corresponding Chinese Patent Application No. 2004800051027.
Harness & Dickey & Pierce P.L.C.
Micronic Laser Systems AB
Nguyen Hung Henry
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