4. Optics: measuring and testing
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Apparatus and method for examining wafers

Optics: measuring and testing – Inspection of flaws or impurities
Patent

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Apparatus and method for exposure

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Apparatus and method for fabricating flat workpieces

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Apparatus and method for feature edge detection in...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and method for feature edge detection in...

Optics: measuring and testing – Position or displacement
Reexamination Certificate

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Apparatus and method for fine alignment of a photomask to a semi

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Apparatus and method for fluid analysis

Optics: measuring and testing – Refraction testing
Patent

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Apparatus and method for fluorescence spectroscopy of remote sam

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Patent

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Apparatus and method for FTIR spectrometer without compensator

Optics: measuring and testing – By particle light scattering – With photocell detection
Patent

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Apparatus and method for gas sensing

Optics: measuring and testing – For light transmission or absorption – Of fluent material
Reexamination Certificate

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Apparatus and method for generation of optical signals

Optics: measuring and testing – Lens or reflective image former testing
Reexamination Certificate

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Apparatus and method for generation of optical signals

Optics: measuring and testing – Lens or reflective image former testing – For optical transfer function
Patent

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Apparatus and method for generation of optical signals

Optics: measuring and testing – Lens or reflective image former testing
Reexamination Certificate

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Apparatus and method for grading, testing, and identifying...

Optics: measuring and testing – Crystal or gem examination
Reexamination Certificate

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Apparatus and method for heterodyne-generated two-dimensional de

Optics: measuring and testing – By particle light scattering – With photocell detection
Patent

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Apparatus and method for high speed scan for detection and...

Optics: measuring and testing – By light interference
Reexamination Certificate

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Apparatus and method for high-efficiency, in-situ particle detec

Optics: measuring and testing – By particle light scattering – With photocell detection
Patent

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Apparatus and method for high-throughput preparation and...

Optics: measuring and testing – By dispersed light spectroscopy – With raman type light scattering
Reexamination Certificate

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Apparatus and method for high-throughput preparation and...

Optics: measuring and testing – By dispersed light spectroscopy
Reexamination Certificate

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Apparatus and method for holding a green sheet and system...

Optics: measuring and testing – Sample – specimen – or standard holder or support
Reexamination Certificate

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