Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1994-03-03
1996-01-02
Rosenberger, Richard A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356246, G01N 2100
Patent
active
054813573
ABSTRACT:
The present invention relates generally to a new apparatus and a method for a high-efficiency in-situ vacuum particle detection. More particularly, the invention encompasses an apparatus for a particle detecting instrument designed to detect the presence of gas-borne particles in a vacuum line with high efficiency, using a sharply converging nozzle to preferentially focus the suspended particles flowing through it into a small region located on the nozzle axis within a few exit dimensions downstream from the nozzle exit. This focal region has a dimension much smaller than that of the nozzle exit, and is illuminated by a narrow, intense light beam. The particles passing through the illuminated focal region are detected by photodetector elements receiving light scattered from the particles. A method and an apparatus for high-efficiency, in-situ particle separation and/or measurement is also disclosed.
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Ahsan Aziz M.
Beyzavi Kianoush
Rao Nagaraja P.
Blecker Ira D.
International Business Machines - Corporation
Rosenberger Richard A.
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