Optics: measuring and testing – By light interference
Reexamination Certificate
2006-08-01
2006-08-01
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Reexamination Certificate
active
07084984
ABSTRACT:
A method of detecting defects or artifacts on or in an object, wherein the defects or artifacts are characterized by a characteristic dimension, the method involving: generating an input beam for illuminating a spot at a selected location on or in the object, wherein the spot has a size L that is substantially larger than the characteristic dimension; deriving a measurement beam and a reference beam from the input beam; directing the measurement beam onto the object as an incident measurement beam that illuminates the spot at that selected location on or in the object to produce a backscattered measurement beam; interfering the backscattered measurement beam with the reference beam to produce an interference beam, the reference beam being oriented relative to the backscattered measurement beam so as to produce a peak sensitivity for a portion of the backscattered measurement beam that emanates from the object at a predetermined diffraction angle; converting the interference beam for that selected location into an interference signal; and using the interference signal for that selected location to determine whether any defects or artifacts characterized by said characteristic dimension are present anywhere within a region on or in the object defined by the spot at that selected location.
REFERENCES:
patent: 3628027 (1971-12-01), Brauss
patent: 3748015 (1973-07-01), Offner
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4226501 (1980-10-01), Shafer
patent: 4272684 (1981-06-01), Seachman
patent: 4685803 (1987-08-01), Sommargren
patent: 4733967 (1988-03-01), Sommargren
patent: 5220403 (1993-06-01), Batchelder
patent: 5241423 (1993-08-01), Chiu et al.
patent: 5327223 (1994-07-01), Korth
patent: 5485317 (1996-01-01), Perissinotto
patent: 5602643 (1997-02-01), Barrett
patent: 5614763 (1997-03-01), Womack
patent: 5633972 (1997-05-01), Walt
patent: 5659420 (1997-08-01), Wakai
patent: 5699201 (1997-12-01), Lee
patent: 5757493 (1998-05-01), Vankerkhove
patent: 5760901 (1998-06-01), Hill
patent: 5828455 (1998-10-01), Smith
patent: 5894195 (1999-04-01), McDermott
patent: 5915048 (1999-06-01), Hill et al.
patent: 5923423 (1999-07-01), Sawatari et al.
patent: 6011654 (2000-01-01), Schweizer et al.
patent: 6018391 (2000-01-01), Yoshida
patent: 6052231 (2000-04-01), Rosenbluth
patent: 6091496 (2000-07-01), Hill
patent: 6124931 (2000-09-01), Hill
patent: 6271923 (2001-08-01), Hill
patent: 6330065 (2001-10-01), Hill
patent: 6445453 (2002-09-01), Hill
patent: 6447122 (2002-09-01), Kobayashi et al.
patent: 6480285 (2002-11-01), Hill
patent: 6552805 (2003-04-01), Hill
patent: 6552852 (2003-04-01), Hill
patent: 6597721 (2003-07-01), Hutchinson et al.
patent: 6606159 (2003-08-01), Hill
patent: 6667809 (2003-12-01), Hill
patent: 6714349 (2004-03-01), Nam
patent: 6717736 (2004-04-01), Hill
patent: 6753968 (2004-06-01), Hill
patent: 6775009 (2004-08-01), Hill
patent: 6806959 (2004-10-01), Tukker
patent: 6847029 (2005-01-01), Hill
patent: 6847452 (2005-01-01), Hill
patent: 2002/0074493 (2002-06-01), Hill
patent: 2002/0131179 (2002-09-01), Hill
patent: 2003/0174992 (2003-09-01), Levene
patent: 2004/0201853 (2004-02-01), Hill
patent: 2004/0201852 (2004-10-01), Hill
patent: 2004/0201854 (2004-10-01), Hill
patent: 2004/0201855 (2004-10-01), Hill
patent: 2004/0202426 (2004-10-01), Hill
patent: 2004/0227950 (2004-11-01), Hill
patent: 2004/0227951 (2004-11-01), Hill
patent: 2004/0228008 (2004-11-01), Hill
patent: 2004/0246486 (2004-12-01), Hill
patent: 2004/0257577 (2004-12-01), Hill
patent: 2005/0036149 (2005-02-01), Hill
U.S. Appl. No. 09/852,369, filed Jan. 3, 2002, Hill.
U.S. Appl. No. 09/917,402, filed Jul. 27, 2001, Hill.
U.S. Appl. No. 10/765,254, filed Jan. 27, 2004, Hill.
U.S. Appl. No. 10/765,368, filed Jan. 27, 2004, Hill.
U.S. Appl. No. 10/886,157, filed Jul. 7, 2004, Hill.
U.S. Appl. No. 60/442,858, filed Jul. 27, 2002, Hill.
U.S. Appl. No. 60/442,982, filed Jan. 29, 2003, Hill.
U.S. Appl. No. 60/443,980, filed Jan. 31, 2003, Hill.
U.S. Appl. No. 60/444,707, filed Jan. 4, 2003, Hill.
U.S. Appl. No. 60/445,739, filed Feb. 7, 2003, Hill.
U.S. Appl. No. 60/447,254, filed Feb. 13, 2003, Hill.
U.S. Appl. No. 60/448,250, filed Jan. 19, 2003, Hill.
U.S. Appl. No. 60/448,360, filed Feb. 19, 2003, Hill.
U.S. Appl. No. 60/459,425, filed Apr. 11, 2003, Hill.
U.S. Appl. No. 60/459,493, filed Apr. 1, 2003, Hill.
U.S. Appl. No. 60/460,129, filed Apr. 3, 2003, Hill.
U.S. Appl. No. 60/485,255, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/485,507, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/501,666, filed Sep. 10, 2003, Hill.
U.S. Appl. No. 60/506,715, filed Sep. 26, 2003, Hill.
Lyons Michael A.
Toatley , Jr. Gregory J.
Wilmer Cutler Pickering Hale and Dorr
Zetetic Institute
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