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Method for inspecting defects and an apparatus for the same

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for inspecting exposure apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for inspecting exposure apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for inspecting surface and apparatus for inspecting it

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for inspecting surface of semiconductor wafer

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for inspecting the surface of a roll cylinder and...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for inspection of a wafer

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for inspection of circuit boards and apparatus for...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for marking at least one point on an object

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for marking defect and device therefor

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for marking defect and device therefor

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for marking defect and device therefor

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for measuring crystal defect and equipment using the same

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for monitoring defects of semiconductor device

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for optically inspecting a wafer by sequentially...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for preparing focus-adjustment data for focusing lens...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for resurfacing panels such as automobile panels or the l

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for the automatic recognition of surface defects in...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method for the detection of processing-induced defects in a...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Method of and apparatus for article inspection including...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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