4. Optics: measuring and testing
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Reconfigurable apparatus and method for inspection during a...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Reducing variations in energy reflected from a sample due to...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Reflectance surface analyzer

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Reticle defect inspection apparatus and reticle defect...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Reticle defect inspection apparatus and reticle defect...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Reticle defect inspection apparatus and reticle defect...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Rotating head ellipsometer

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Rotational stage with vertical axis adjustment

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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