Method for preparing focus-adjustment data for focusing lens...

Details Method for preparing focus-adjustment data for focusing lens... Method for preparing focus-adjustment data for focusing lens...

2007-04-02

2010-10-19

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237300

Reexamination Certificate

active

07817264

ABSTRACT:
In a method for preparing focus-adjustment data for a focusing lens system of an optical defect-inspection apparatus, a wafer having a plurality of defects is positioned in place with respect to a focal plane defined by the focusing lens system at a positioning step, and the detects on the wafer are optically and electronically detected at a detecting step. Then, defects having a predetermined size are extracted among the detected defects at extracting step, and a number of the extracted defects is counted as defect-number data. The positioning, detecting, extracting and counting steps are repeated whenever the focus-adjustment wafer is relatively shifted from the focal plane by a predetermined distance, and a defect-number distribution is produced based on the defect-number data thus obtained.

REFERENCES:
patent: 4626101 (1986-12-01), Ogawa et al.
patent: 6344897 (2002-02-01), Miyazaki et al.
patent: 6801650 (2004-10-01), Kikuchi et al.
patent: 6890859 (2005-05-01), Bamnolker et al.
patent: 2001/0020194 (2001-09-01), Takagi et al.
patent: 2006/0030060 (2006-02-01), Noguchi et al.
patent: 2007/0035725 (2007-02-01), Takahashi et al.
patent: 2000-58606 (2000-02-01), None
patent: 2003-271927 (2003-09-01), None

Affiliated with

Also associated with

Rating

Method for preparing focus-adjustment data for focusing lens... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for preparing focus-adjustment data for focusing lens..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for preparing focus-adjustment data for focusing lens... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4176602