Method for inspecting surface and apparatus for inspecting it

Details Method for inspecting surface and apparatus for inspecting it Method for inspecting surface and apparatus for inspecting it

2006-12-26

2006-12-26

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400

Reexamination Certificate

active

07154597

ABSTRACT:
A method for inspecting a surface, including entering a predetermined luminous flux at a predetermined incident angle in an inspected surface of an inspection object which is an object of a surface inspection, displaying relatively at least one of the luminous flux and the inspection object so that the luminous flux scans upon the inspected surface, decomposing spatially light intensity of scattered light reflected on an area of the inspected surface entering the luminous flux into a plurality of channels with respect to an one-dimensional direction corresponding to a predetermined direction in the area of the inspected surface entering the light flux, performing inspection of the inspected surface by detecting individually light intensity of each of the decomposed scattered lights obtained by the decomposition, and increasing uniformity of light intensity distribution with respect to at least the predetermined direction in the area of the inspected surface in which the luminous flux is entered.

REFERENCES:
patent: 5098191 (1992-03-01), Noguchi et al.
patent: 6204918 (2001-03-01), Isozaki et al.
patent: 6727987 (2004-04-01), Yonezawa
patent: 56-067739 (1981-06-01), None
patent: 11-295229 (1999-10-01), None
U.S. Appl. No. 10/864,062, filed Jun. 9, 2004, Miyakawa et al.

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