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Defect repair device and defect repair method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defect review system with 2D scanning and a ring detector

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defect testing apparatus and defect testing method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defect-position identifying method for semiconductor substrate

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defining a pattern on a substrate

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defining a pattern on a substrate

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defining a pattern on a substrate

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Detecting surface pits

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Detection and analysis of a fine foreign matter on a sample

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Detection of a wafer edge using collimated light

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Detection of contaminants on low wavelength masks

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Detection of lens anti-reflective coating decay by undesired...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Device and method for controlling the surface of an object

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Device and method for determining the properties of surfaces

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Device and method for determining the properties of surfaces

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Device and method for determining the properties of surfaces

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Device and method for inspecting an object

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Device and method for scanning pieces of solid wood

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Device for automatic surface inspection of an unwinding strip

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Device for dark field illumination and method for optically...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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