Device for dark field illumination and method for optically...

Details Device for dark field illumination and method for optically... Device for dark field illumination and method for optically...

2006-07-05

2009-10-13

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07602483

ABSTRACT:
The invention relates to a device for dark-field illumination for an optical testing device for scanning a plane surface of an object together with a method for optical scanning of a plane surface of an object in which the device according to the invention is used. The illumination device according to the invention has a reflector which has in cross-section the form of a segment of an ellipse, while the illumination device may be arranged with a first focal point of the ellipse on the surface of the object, and the light source located at a point which results from reflection of the second focal point of the ellipse on the surface of the object. By this means, dark-field illumination with a high level of illumination at the first focal point is obtained, even when the light source is located a good distance away from the object.

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Search Report from priority application No. DE 10 2005 031 647.6, filed Jul. 6, 2005.

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