Device and method for determining the properties of surfaces

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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C356S237400

Reexamination Certificate

active

07460218

ABSTRACT:
The present invention relates to a device and a method for determining the properties of surfaces having at least one first radiation means for collimated irradiation of a measurement surface to be examined and at least one second radiation means for non-collimated irradiation of said measurement surface wherein the space above said measurement surface has substantially radiation-absorbing properties.The device of the invention further comprises at least one radiation detector means which captures at least a portion of the radiation reflected and/or diffused off the surface to be examined and emits at least one measurement signal which is characteristic of the reflected and/or diffused radiation.

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patent: 4933567 (1990-06-01), Silva et al.
patent: 6509964 (2003-01-01), Wiles et al.
patent: 6542248 (2003-04-01), Schwarz
patent: 6654132 (2003-11-01), Schietinger et al.
patent: 6822734 (2004-11-01), Eidelman et al.
patent: 6842250 (2005-01-01), Schwarz
patent: 4319869 (1994-12-01), None

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