Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Patent
1998-05-27
1999-12-21
Rosenberger, Richard A.
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
356 72, B23K 2600, G01N 2100
Patent
active
060056606
ABSTRACT:
A foreign matter processing apparatus is disclosed for detecting a foreign matter sticking to the surface of a sample such as a circuit board. In the sample processing apparatus of the present invention, a fine foreign matter sticking to a surface of a sample is detected, and the composition of the detected foreign matter is analyzed. Then, it is determined based on a result of the analysis and various data registered in advance whether or not it is required to remove the foreign matter, and the foreign matter, whose removal has been determined to be required, is removed from the surface of the sample. Accordingly, detection, analysis and removal of a foreign matter on the surface of a sample can be performed by a single apparatus.
REFERENCES:
patent: 5023424 (1991-06-01), Vaught
patent: 5497007 (1996-03-01), Vritsky et al.
patent: 5865901 (1999-02-01), Yin et al.
"Study of Semiconductors 26," VLSI Technology 11 The Industrial Research Society of Japan, pp. 167-168.
Kiyoshi Takahashi, et al., "The Foundation of A Light-Excited Process," The Industrial Research Society of Japan, (1994), pp. 220-227.
Miyamoto Nobuo
Yoshida Haruo
Advantest Corporation
Rosenberger Richard A.
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