Defect review system with 2D scanning and a ring detector

Details Defect review system with 2D scanning and a ring detector Defect review system with 2D scanning and a ring detector

2004-10-28

2008-10-07

Lauchman, L. G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237300, C356S237400, C356S237500, C356S237600, C356S338000, C356S445000

Reexamination Certificate

active

07433031

ABSTRACT:
A defect review system includes a stage, a light source, a turning mirror, and a ring of collectors. The stage supports and moves an article for inspection, the article having a surface. The light source provides light. The turning mirror turns the light toward the surface at an oblique incident angle whereby the light illuminates a spot on the surface and the light scatters from the spot. The ring of collectors is adapted to collect scattering light. A method of reviewing surface of a wafer is disclosed. The method provides a dark-field mode of operation adapted to inspect the surface by illuminating a spot on the surface at an oblique angle and collecting scattering light from the surface. Further, the method provides a bright-field mode of operation adapted to inspect the surface by illuminating a spot on the surface at a normal angle to examine the reflecting light.

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