Methods and systems for determining a composition and a...

Methods and systems for determining a critical dimension and...

Methods and systems for determining a property of a specimen...

Methods and systems for determining a thickness of a...

Methods and systems for realizing high resolution...

Methods for characterizing semiconductor material using...

Methods for characterizing semiconductor material using...

Methods of calibrating and controlling stepper exposure...

Methods, apparatus and computer program products for...

Micropattern shape measuring system and method

Micropattern shape measuring system and method

Modal method modeling of binary gratings with improved...

Modeling a sample with an underlying complicated structure

Monitor CMP process using scatterometry

Monitoring apparatus for polishing pad and method thereof

Monitoring dimensions of features at different locations in...

Monitoring of film characteristics during plasma-based...

Movable-type flatness measurement apparatus

Movable-type flatness measurement apparatus

Noise-reduction metrology models