Optics: measuring and testing – Dimension
Reexamination Certificate
2005-05-25
2008-05-20
Lauchman, L. G (Department: 2877)
Optics: measuring and testing
Dimension
C356S630000, C702S155000, C702S170000
Reexamination Certificate
active
07375828
ABSTRACT:
A method of determining actual properties of layered media. An incident beam of light is directed towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light. The actual properties of the reflected beam of light are measured, and properties of the layered media are estimated. A mathematical model of the layered media based on a modal function expansion is solved with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light. The eigenvalues of the modal functions are computed recursively by recasting the eigenvalue equation in the following form:in-line-formulae description="In-line Formulae" end="lead"?βni+1=F(βni)in-line-formulae description="In-line Formulae" end="tail"?where βni=the eigenvalue of the ithrecursion and F is a function such that βn=F(βn) is mathematically identical to the eigenvalue equation.
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Aoyagi Paul
Poslavsky Leonid
KLA-Tencor Corporation
Lauchman L. G
Luedeka Neely & Graham P.C.
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