Movable-type flatness measurement apparatus

Details Movable-type flatness measurement apparatus Movable-type flatness measurement apparatus

2008-03-18

2008-03-18

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Dimension

Area

C356S601000, C356S614000, C356S243100, C033S533000, C033S551000, C033S553000, C033S554000, C033S555000

Reexamination Certificate

active

11247247

ABSTRACT:
In a flatness measurement apparatus, a sensor unit having a flatness-detection sensor is slidable along the linear guide rail. A support system supports the linear guide rail such that the linear guide rail is rotatable in a horizontal plane, whereby a surface of a wafer stage to be measured is scanned all over with the sensor unit having the flatness-detection sensor so as to ensure a flatness measurement of the whole surface of the wafer stage.

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