4. Optics: measuring and testing
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Displacement information measuring apparatus with hyperbolic...

Optics: measuring and testing – By light interference – For dimensional measurement
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Displacement interferometer system and exposer using the same

Optics: measuring and testing – By light interference – For dimensional measurement
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Displacement measurement system

Optics: measuring and testing – By light interference – For dimensional measurement
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Displacement measurement system and method of use

Optics: measuring and testing – By light interference – For dimensional measurement
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Displacement measurement systems lithographic apparatus and...

Optics: measuring and testing – By light interference – For dimensional measurement
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Displacement measuring apparatus

Optics: measuring and testing – By light interference – For dimensional measurement
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Displacement measuring device with interference grating

Optics: measuring and testing – By light interference – Having polarization
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Displacement measuring instrument and displacement measuring...

Optics: measuring and testing – By light interference – Having polarization
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Displacement pickup

Optics: measuring and testing – By light interference – For dimensional measurement
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Displacement sensor

Optics: measuring and testing – By light interference – For dimensional measurement
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Displacement sensor based on photonic crystal waveguides

Optics: measuring and testing – By light interference – Using fiber or waveguide interferometer
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Displacement sensor based on photonic crystal waveguides

Optics: measuring and testing – By light interference – Using fiber or waveguide interferometer
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Distance measuring interferometer and encoder metrology...

Optics: measuring and testing – By light interference – For dimensional measurement
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Distortion measurement imaging system

Optics: measuring and testing – By light interference – Having polarization
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Dither control system for a ring laser gyro

Optics: measuring and testing – By light interference – Rotation rate
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Dither motor having integrated drive and pickoff transducers

Optics: measuring and testing – By light interference – Rotation rate
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Dither motor having integrated drive and pickoff transducers

Optics: measuring and testing – By light interference – Rotation rate
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Dither stripper having least-mean-squares adaptive updating...

Optics: measuring and testing – By light interference – Rotation rate
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Dither stripper with non-linearity correction

Optics: measuring and testing – By light interference – Rotation rate
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Dither system for motion sensors

Optics: measuring and testing – By light interference – Rotation rate
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