Displacement measurement system and method of use

Details Displacement measurement system and method of use Displacement measurement system and method of use

2011-04-12

2011-04-12

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S521000, C250S23700G

Reexamination Certificate

active

07924433

ABSTRACT:
A measurement displacement system and method are described. The measurement displacement system comprises a sensor head configured to transmit input optical beams and to receive measurement beams. The system comprises a transmission grating configured to diffract the input optical beams into sub-beams comprising more than one diffraction order. The transmission grating is adapted move in a direction. The measurement displacement system comprises a reflective element configured to diffract the sub-beams from the transmission grating and to return the sub-beams to the transmission grating. The reflective element is substantially stationary relative to the sensor head and the transmission grating selectively recombines the sub-beams to form the measurement beams and returns the measurement beams to the sensor head.

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