Displacement measurement systems lithographic apparatus and...

Details Displacement measurement systems lithographic apparatus and... Displacement measurement systems lithographic apparatus and...

2006-03-21

2009-12-22

Lee (Andrew), Hwa S (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S488000

Reexamination Certificate

active

07636165

ABSTRACT:
A displacement measurement system configured to provide measurement of the relative displacement of two components in six degrees of freedom with improved consistency and without requiring excessive space.

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