Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2005-10-18
2005-10-18
Smith, Zandra V. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
Reexamination Certificate
active
06956654
ABSTRACT:
A displacement measuring device allows a plurality of light beams to be incident at positions on a scale or diffracted at points on a scale grating, which are farther spaced away from each other than the diameter of the light beams on the scale grating, and makes an angle of incidence of each light beam on the scale equal generally to an angle of transmission of the diffracted light beam of each light beam. This makes the strength of a detection signal impervious to variations in pitch angle and allows for providing good signals. Accordingly, it is possible to attach the device easily to an apparatus and provide improved ease of use for the device.
REFERENCES:
patent: 5035507 (1991-07-01), Nishioki et al.
patent: 6166817 (2000-12-01), Kuroda
patent: A 1-185415 (1989-07-01), None
patent: A 2000-81308 (2000-03-01), None
Osaki Motohiro
Tomiya Masaki
Connolly Patrick
Mitutoyo Corporation
Oliff & Berridg,e PLC
Smith Zandra V.
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