Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2011-03-01
2011-03-01
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
Having polarization
C356S616000
Reexamination Certificate
active
07898670
ABSTRACT:
A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a reference substrate to determine distortion. In addition, a highly reflective background is implemented to provide for more resolution during distortion measurement.
REFERENCES:
patent: 4566762 (1986-01-01), Kato
patent: 5073021 (1991-12-01), Marron
patent: 5757459 (1998-05-01), Bhalakia et al.
patent: 6236633 (2001-05-01), Chang et al.
patent: 6426838 (2002-07-01), Rudeen
patent: 6654061 (2003-11-01), Yamada
patent: 6674522 (2004-01-01), Krantz et al.
patent: 6685315 (2004-02-01), De Carle
patent: 6882432 (2005-04-01), Deck
patent: 7035009 (2006-04-01), Kelly et al.
patent: 2002/0024673 (2002-02-01), Ouchi
patent: 2003/0031110 (2003-02-01), Ishizuka
patent: 2003/0053066 (2003-03-01), Redner
patent: 2004/0021863 (2004-02-01), Kurata et al.
patent: 2005/0177339 (2005-08-01), Kuhn
patent: 2005/0219522 (2005-10-01), Jones
patent: 2006/0126077 (2006-06-01), Ueki et al.
patent: 2006/0203251 (2006-09-01), Millerd et al.
patent: 2006/0247891 (2006-11-01), Fox et al.
Berg David
Gollier Jacques
Goodman Douglas S
Ustanik Correy Robert
Beall Thomas R.
Chowdhury Tarifur
Corning Incorporated
Hansen Jonathan M
LandOfFree
Distortion measurement imaging system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Distortion measurement imaging system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Distortion measurement imaging system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2746275