Distance measuring interferometer and encoder metrology...

Details Distance measuring interferometer and encoder metrology... Distance measuring interferometer and encoder metrology...

2007-11-15

2010-10-12

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S073000, C356S486000, C356S499000

Reexamination Certificate

active

07812964

ABSTRACT:
In general, in one aspect, the invention features a system that includes a moveable stage, an interferometer configured to provide information about a first degree of freedom of the stage, an encoder configured to provide information about a second degree of freedom of the stage, and an electronic processor configured to monitor the position of the stage based on the information about the first and second degrees of freedom.

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