Displacement sensor

Details Displacement sensor Displacement sensor

2006-06-01

2009-06-23

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07551295

ABSTRACT:
An apparatus and method for detecting multiple beams from a beamsplitter is disclosed. Some embodiments of the present invention are particularly well-suited for use in microphones, high-sensitivity pressure sensors, vibration sensors, and accelerometer applications. Some embodiments of the present invention generate a differential electrical output signal that is based on multiple detected optical signals. The differential output signal is generated in response to an environmental stimulus, such as a pressure differential or incident acoustic energy. In accordance with the illustrative embodiment, an optical displacement sensor redirects the transmitted beam back through the optically-resonant cavity with an angular offset. Due to the angular offset, the redirected beam (i.e., retransmitted beam) transits the cavity with an intra-cavity path length that corresponds to substantially full transmittance of the retransmitted beam in the absence of the environmental stimulus.

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Office Action from U.S. Appl. No. 11/366,730 dated Nov. 28, 2007.

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