Displacement measurement system

Details Displacement measurement system Displacement measurement system

2007-03-15

2009-06-09

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07545507

ABSTRACT:
A displacement measurement apparatus includes a light source, a splitter grating, a measurement grating, and first a second detector arrays. The splitter grating splits a light beam into first and second measurement channels that each illuminates the measurement grating. The first and second measurement channels split into 0thand 1storder diffraction products at the measurement grating in a first pass and recombine at the measurement grating in a second pass before being measured at the first and second detector arrays.

REFERENCES:
patent: 4772119 (1988-09-01), Bouwhuis et al.
patent: 4979826 (1990-12-01), Ishizuka et al.
patent: 5661296 (1997-08-01), Ishizuka et al.
patent: 2002/0085210 (2002-07-01), Takayama et al.
patent: 2007/0058173 (2007-03-01), Holzapfel

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