Stabilized infrared source for infrared spectrometers

Stable Fabry-Perot interferometer

Stage alignment in lithography tools

Stage alignment in lithography tools

Stage apparatus and control method including first and...

Stage apparatus including a correction unit to correct a...

Stage device and exposure apparatus

Statistical method of generating a synthetic hologram from...

Stepped etalon

Stimulated rate optical power measurement in a fiber optic...

Stroboscopic interferometry with frequency domain analysis

Structure and method for a microelectromechanically tunable...

Sub-nanometer overlay, critical dimension, and lithography...

Sub-nanometer overlay, critical dimension, and lithography...

Support apparatus for optical wave interferometer reference...

Surface characteristic determining apparatus

Surface characterization based on optical phase shifting...

Surface inspecting apparatus that determines an edge...

Surface inspection apparatus

Surface inspection by double pass laser doppler vibrometry