Stage apparatus including a correction unit to correct a...

Details Stage apparatus including a correction unit to correct a... Stage apparatus including a correction unit to correct a...

2007-11-06

2007-11-06

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

11248226

ABSTRACT:
A stage apparatus including a stage capable of moving an object, first and second measurement units adapted to measure a displacement of the stage in a predetermined direction based on a variation of an optical path length of measurement light, which are arranged so as to have an overlap area to simultaneously measure a stage position while the stage is being moved, a switching unit to switch measurement by the first measurement unit to measurement by the second measurement unit by delivering a measurement value from the first measurement unit to the second measurement unit in the overlap area, and a correction unit, in the stage position upon switching by the switching unit, to correct a wavelength variation of the measurement light based on the measurement value delivered from the first measurement unit to the second measurement unit.

REFERENCES:
patent: 6043500 (2000-03-01), Akimoto
patent: 6359688 (2002-03-01), Akimoto et al.
patent: 6567154 (2003-05-01), Akimoto
patent: 6819433 (2004-11-01), Takal et al.
patent: 6864963 (2005-03-01), Chen et al.
patent: 7042576 (2006-05-01), Hattori
patent: 2003/0142321 (2003-07-01), Hattori
patent: 2005/0083501 (2005-04-01), Akimoto
patent: 2005/0190375 (2005-09-01), Akimoto
patent: 2002-319541 (2002-10-01), None

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