Surface inspection apparatus

Details Surface inspection apparatus Surface inspection apparatus

2006-09-05

2006-09-05

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07102762

ABSTRACT:
A surface inspection apparatus for inspecting a surface of an object to be inspected, includes: a projecting optical system which projects an inspection light to the object surface via a reference surface; a pick up unit which picks up surface interference fringes formed by reflected light from the reference surface and reflected light from the object surface; and an arithmetic unit which calculates a shape of the surface of the object based on the picked up interference fringes. The projecting optical system includes a laser light source that emits, as the inspection light, pulsed laser light having a pulse width and a pulse quiescent time capable of preventing formation of rear face interference fringes which are formed by the reflected light from the object surface and reflected light caused by the inspection light being reflected from its rear face, the object allowing the inspection light to pass therethrough.

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patent: 5452088 (1995-09-01), Ai
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patent: 6501552 (2002-12-01), Mizuno
patent: 6757067 (2004-06-01), Lee et al.
patent: 2001-124532 (2001-05-01), None

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