Optics: measuring and testing – By light interference – Spectroscopy
Reexamination Certificate
1999-12-22
2001-09-25
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
Spectroscopy
C356S519000
Reexamination Certificate
active
06295130
ABSTRACT:
BACKGROUND OF INVENTION
In xerographic color printing applications, it is desirable to have in situ monitoring systems to measure the color accuracy of the printing. Hence, it is useful to have compact and economical spectrophotometers in color printers to provide for color sensing capability and other color sensing applications.
SUMMARY OF INVENTION
A compact microelectromechanically tunable spectrophotometer having a Fabry-Perot cavity filter is integrated with a silicon photodetector and an optical fiber is used for inputting light vertically on a silicon substrate to make a color sensing system. The Fabry-Perot cavity thickness in accordance with the invention may be tuned electrostatically to resolve the spectral distribution of the transmitted light signal. The spectrophotometer system has applications to color sensing in xerography and other spectroscopic applications. The use of a charge drive mode for tuning the Fabry-Perot cavity filter avoids the electrostatic instability of a voltage drive mode and provides better linearity than use of a voltage drive mode.
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Peeters, Eric. “Process Development For 3D Silicon Microstructures, With Application To Mechanical Sensor Devices,”Dissertation Doctorate from Katholieke Universiteit Leuven, 1994, pp. 170-193, 208-219.
Tran, A.T.T.D. et al. “Surface Micromachined Fabry-Perot Tunable Filter.”IEEE Photonics Technology Letters, vol. 8, No. 3, Mar. 1996, pp. 393-395.
Vail, E.C. et al. “GaAs Micromachined Widely Tunable Fabry-Perot Filters.”Electronics Letters, vol. 31, No. #, Feb. 2, 1995, pp. 228-229.
Kubby Joel A.
Peeters Eric
Sun Decai
Tran Alex T.
Turner Samuel A.
Xerox Corporation
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