Surface characterization based on optical phase shifting...

Details Surface characterization based on optical phase shifting... Surface characterization based on optical phase shifting...

2011-08-02

2011-08-02

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S520000, C356S521000

Reexamination Certificate

active

07990543

ABSTRACT:
Apparatus, techniques and systems for implementing an optical interferometer to measure surfaces, including mapping of instantaneous curvature or in-plane and out-of-plane displacement field gradients of a sample surface based on obtaining and processing four optical interferograms from a common optical reflected beam from the sample surface that are relatively separated in phase by π/2.

REFERENCES:
patent: 6031611 (2000-02-01), Rosakis et al.
patent: 6268883 (2001-07-01), Zehnder et al.
patent: 6469788 (2002-10-01), Boyd et al.
patent: 6781702 (2004-08-01), Giannakopoulos et al.
patent: 7363173 (2008-04-01), Rosakis et al.
patent: 7487050 (2009-02-01), Rosakis et al.
patent: 7538891 (2009-05-01), Mello et al.
patent: 7760363 (2010-07-01), Chen et al.
patent: 2002/0012122 (2002-01-01), Boyd et al.
patent: 2003/0106378 (2003-06-01), Giannakopoulos et al.
patent: 2005/0030551 (2005-02-01), Rosakis et al.
patent: 2005/0278126 (2005-12-01), Rosakis et al.
patent: 2006/0039007 (2006-02-01), Kim et al.
patent: 2006/0146342 (2006-07-01), Doerband et al.
patent: 2006/0276977 (2006-12-01), Rosakis et al.
patent: 2007/0019203 (2007-01-01), Jansen
patent: 2007/0180919 (2007-08-01), Rosakis et al.

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