Surface inspecting apparatus that determines an edge...

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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Reexamination Certificate

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10697314

ABSTRACT:
A surface inspecting apparatus for inspecting a shape of a surface of an object to be inspected is disclosed. The surface inspecting apparatus includes a mounting base for mounting the object, a positioning device for positioning the object to an inspecting position on the mounting base, a memory for storing position specifying information for specifying a two-dimensional position of the object when the object is positioned, an inputting device for inputting an outer shape data of the object, and edge position determining device for acquiring an edge position of the object based on the stored position specifying information and the inputted outer shape data.

REFERENCES:
patent: 4887904 (1989-12-01), Nakazato et al.
patent: 2004/0160609 (2004-08-01), Ohsawa et al.
patent: 10-221033 (1998-08-01), None

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