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Auto-focus alignment and measurement system and method

Optics: measuring and testing – By alignment in lateral direction
Patent

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Autofocus system

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Automated mask alignment for UV projection expose system

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Automated material handling laser alignment tool

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Automatic alignment apparatus

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Automatic alignment system

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Automatic control system for construction machinery

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Automatic optical inter-alignment of two linear arrangements

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Automatic sample alignment system and method of use

Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate

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Axis determination apparatus, film-thickness measurement...

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Calibrating a lithographic apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Calibration method for a lithographic apparatus and device...

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Calibration wafer for a stepper

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Cantilever system for holding and positioning components

Optics: measuring and testing – By alignment in lateral direction
Patent

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CCD based confocal filtering for improved accuracy in x-ray prox

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Centering device for the manufacture of a center hole in disks

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Clearance measuring device and method for exposure

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Code reading device and method with light passing through...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Combined segmented and nonsegmented bar-in-bar targets

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Component placement machine and method of placing a component on

Optics: measuring and testing – By alignment in lateral direction
Patent

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