Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate
2006-08-29
2006-08-29
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With light detector
Reexamination Certificate
active
07099009
ABSTRACT:
An arrangement for aligning a semiconductor process tool to a track system, and a method which facilitates the calibration and alignment between a previously installed overhead transport system in a fabrication facility or plant for semiconductor wafers or integrated circuit components, and a plurality of load ports on a process tool for the semiconductor wafer or integrated circuit components, which is to be subsequently installed in the fabrication facility.
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DeGeorge Joseph P.
Young, Jr. Robert R.
Akanbi Isiaka O.
International Business Machines - Corporation
Scully , Scott, Murphy & Presser, P.C.
Steinberg, Esq. William H.
Toatley , Jr. Gregory J.
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