Automatic sample alignment system and method of use

Details Automatic sample alignment system and method of use Automatic sample alignment system and method of use

2011-06-21

2011-06-21

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

C356S445000, C356S369000, C356S364000, C356S400000

Reexamination Certificate

active

07965390

ABSTRACT:
A system which automatically reduces change in effective angle and plane of incidence of a reflected focused beam of electromagnetic radiation entering a detector, via use of a detector with dimensions less than is the spatial spread of a reflected focused beam at a location distal to the location on said sample from which it is caused to reflect, preferably after passing through a collimating lens. The basis of operation is that the portion of a reflected focused beam intercepted by the detector changes with change in sample position and/or orientation.

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patent: 2010/0220330 (2010-09-01), Ran et al.

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