Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent
1978-03-29
1981-05-12
Corbin, John K.
Optics: measuring and testing
By alignment in lateral direction
With light detector
250236, 350 68, 356375, G01B 1100, G01B 1114, G02B 2717
Patent
active
042668760
ABSTRACT:
An alignment apparatus for bringing two objects, each having at least one reference mark, into a predetermined positional relation is disclosed in which the two objects are scanned by a beam of light emitted from a coherent light source, the light coming from the reference marks is received and converted into electrical signals by means of which the amount of deviation between the two objects is detected and the two objects are adjusted to the predetermined positional relation. Repetitively swept light from the light source is divided into two parts which scan the reference marks at different times and along different directions.
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patent: 3776995 (1973-12-01), Little, Jr.
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patent: 4103998 (1978-08-01), Nakazawa et al.
patent: 4153371 (1979-05-01), Koizumi et al.
Nakazawa Kiwao
Tanimoto Akikazu
Corbin John K.
Nippon Kogaku K.K.
Punter Wm. H.
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