Micro-mirror and a method for fabricating the same

Micro-mirror and a method for fabricating the same

Micro-mirror device

Micro-mirror device including dielectrophoretic liquid

Micro-mirror device including dielectrophoretic liquid

Micro-mirror device with light angle amplification

Micro-optical switch and method for manufacturing the same

Micro-oscillating element provided with torsion bar

Micro-oscillating member, light-deflector, and image-forming...

Microactuator for optical switching and method for...

Microelectromechanical mirrors and electrically-programmable...

Microelectromechanical television scanning device and method for

Micromachined device with stretchable restoring force member

Micromachined mirror with stretchable restoring force member

Micromachined scanning torsion mirror and method

Micromechanical device having an improved beam

Micromechanical device having an improved beam

Micromechanical device manufactured out of incompatible material

Micromechanical device with adjustable resonant frequency by...

Micromechanical light modulator with optically interlaced output