Micromechanical device with adjustable resonant frequency by...

Details Micromechanical device with adjustable resonant frequency by... Micromechanical device with adjustable resonant frequency by...

2008-01-03

2010-11-09

Font, Frank G (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S221200

Reexamination Certificate

active

07830577

ABSTRACT:
A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.

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Official communication issued in counterpart Chinese Application, mailed on Jun. 26, 2009.

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