Microelectromechanical mirrors and electrically-programmable...

Details Microelectromechanical mirrors and electrically-programmable... Microelectromechanical mirrors and electrically-programmable...

2005-11-22

2005-11-22

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S212100, C359S291000, C359S295000, C359S298000

Reexamination Certificate

active

06967757

ABSTRACT:
A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.

REFERENCES:
patent: 5757536 (1998-05-01), Ricco et al.
patent: 5804084 (1998-09-01), Nasby et al.
patent: 5867302 (1999-02-01), Fleming
patent: 5905571 (1999-05-01), Butler et al.
patent: 5999319 (1999-12-01), Castracane
patent: 6028689 (2000-02-01), Michalicek et al.
patent: 6329738 (2001-12-01), Hung et al.
patent: 6433917 (2002-08-01), Mei et al.
patent: 6512625 (2003-01-01), Mei et al.
patent: 6708491 (2004-03-01), Weaver et al.
patent: 6808952 (2004-10-01), Sniegowski et al.
patent: 2002/0012490 (2002-01-01), Farmer, III et al.
patent: 2002/0149834 (2002-10-01), Mei et al.
patent: 2002/0167245 (2002-11-01), Hung et al.
patent: 2002/0167695 (2002-11-01), Senturia
patent: 2002/0191913 (2002-12-01), Hocker et al.
patent: 2003/0072068 (2003-04-01), Deutsch et al.
Hung, et al, “Extending the Travel Range of Analog-Tuned Electrostatic Actuators”, Journal of Microelectromechanical Systems, vol. 8 No. 4 Dec. 1999, pp. 497-505, IEEE.
Dagel, et al, “MEMS Adaptive Optics Devices: LDRD No. 02-1385 Summary Report” SAND2002-3954, Dec. 2002, Sandia National Laboratories.

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