Micro-mirror and a method for fabricating the same

Details Micro-mirror and a method for fabricating the same Micro-mirror and a method for fabricating the same

2006-03-07

2006-03-07

Nguyen, Thong (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S223100, C359S838000

Reexamination Certificate

active

07009747

ABSTRACT:
A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.

REFERENCES:
patent: 5910856 (1999-06-01), Ghosh et al.
patent: 6389190 (2002-05-01), Solgaard et al.
patent: 6456420 (2002-09-01), Goodwin-Johansson
patent: 6587612 (2003-07-01), Mitchell et al.
patent: 6681063 (2004-01-01), Kane et al.

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