Micromachined scanning torsion mirror and method

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

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359223, G02B 2608

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active

06075639&

ABSTRACT:
A silicon nitride scanning torsion mirror supported within a layer of silicon nitride by integral silicon nitride hinges. The layer is supported by a substrate which has a well beneath said mirror. A method of forming a silicon nitride scanning torsion mirror which includes depositing a silicon nitride layer on a support substrate etching the silicon nitride layer to form a mirror supported within the layer by integral torsion hinges and then selectively etching the substrate under the mirror to form a well.

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