Micro-mirror and a method for fabricating the same

Details Micro-mirror and a method for fabricating the same Micro-mirror and a method for fabricating the same

2007-02-06

2007-02-06

Dunn, Drew A. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

11297929

ABSTRACT:
A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.

REFERENCES:
patent: 5910856 (1999-06-01), Ghosh et al.
patent: 5966230 (1999-10-01), Swartz et al.
patent: 6389190 (2002-05-01), Solgaard et al.
patent: 6456420 (2002-09-01), Goodwin-Johansson
patent: 6587612 (2003-07-01), Mitchell et al.
patent: 6681063 (2004-01-01), Kane et al.
patent: 7009747 (2006-03-01), Hara et al.

Affiliated with

Also associated with

Rating

Micro-mirror and a method for fabricating the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-mirror and a method for fabricating the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-mirror and a method for fabricating the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3824575