Micro-oscillating element provided with torsion bar

Details Micro-oscillating element provided with torsion bar Micro-oscillating element provided with torsion bar

2006-04-18

2006-04-18

Cherry, Euncha P. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S212100

Reexamination Certificate

active

07031041

ABSTRACT:
A micro-oscillating element is provided with a frame (113) and a oscillating member (111) connected with the frame (113) via a connector (112). Each connector (112) includes two torsion bars (112a), each torsion bar (112a) being constructed so that the rigidity becomes relatively high toward the frame (113) and relatively low toward the oscillating member (111) by forming a plurality of holes (112b).

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