Method and apparatus for optical code reading using a MEM optica
Method and apparatus for steering light
Method and device for modulating light with optical...
Method for fabricating a DMD spatial light modulator with a hard
Method for manufacturing a micromechanical device
Method for manufacturing an electrodisplacive actuated mirror ar
Method of making a deformable grating apparatus for modulating a
Method of making magnetically driven light modulators
Method of micromachining a scanning torsion mirror
Method of passivating a micromechanical device within a hermetic
Methods and devices for inhibiting tilting of a movable...
Micro mirror unit and its manufacturing process, and optical...
Micro-actuation element provided with torsion bars
Micro-actuation element provided with torsion bars
Micro-electro-mechanical device having improved torsional...
Micro-electro-mechanical-system micromirrors for high fill...
Micro-electromechanical (MEM) optical resonator and method
Micro-electromechanical microshutter array
Micro-machined mirror using tethered elements
Micro-mechanical beam protective support structures wherein...