Method of micromachining a scanning torsion mirror

Details Method of micromachining a scanning torsion mirror Method of micromachining a scanning torsion mirror

1999-11-10

2000-09-19

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359900, 359223, G02B 2608

Patent

active

061220906

ABSTRACT:
A method of forming a silicon nitride scanning torsion mirror which includes depositing a silicon nitride layer on a support substrate, etching the silicon nitride layer to form a mirror supported within the layer by integral torsion hinges and then selectively etching the substrate under the mirror to form a well.

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Petersen, K.E., "Silicon Torsional Scanning Mirror", IBM J. Res. Develop., vol. 24, No. 5, Sept. 1980, pp. 631-637.
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Jaecklin et al., "Line-addressable torsional micromirrors for light modulator arrays", Sensors and Actuators, A44 (1994), pp. 83-89 (No Month).
Mattsson, K.E. "Surface micromachined scanning mirrors", Microelectronic Engineering19 (1992), pp. 199-204 (No Month).

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