Micro mirror unit and its manufacturing process, and optical...

Details Micro mirror unit and its manufacturing process, and optical... Micro mirror unit and its manufacturing process, and optical...

2011-07-19

2011-07-19

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07982937

ABSTRACT:
The micro mirror unit includes a substrate, on which are provided a micro mirror reflecting light, a torsion bar supporting the micro mirror, a frame rotatably supporting the torsion bar, and a deformative supporting part which deforms itself to lift the frame away from the substrate and supports the frame in such a lifted condition. This arrangement makes it possible to realize an increased space between the micro mirror and the substrate, thereby realizing an enlarged mirror tilt angel, without increasing the thickness of the sacrifice layer.

REFERENCES:
patent: 6044705 (2000-04-01), Neukermans et al.
patent: 6366414 (2002-04-01), Aksyuk et al.
patent: 6392220 (2002-05-01), Slater et al.
patent: 1 193 527 (2002-04-01), None
patent: WO 00/20899 (2000-04-01), None
D.T. Neilson et al. Fully Provisioned 112×112 Micro-Mechanical Optical Crossconnect with 35.8Tb/s Demonstrated Capacity. Optical Fiber Communications Conference (OFC 2000) Postdealine Paper PD-12.

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