Micro-mechanical beam protective support structures wherein...

Details Micro-mechanical beam protective support structures wherein... Micro-mechanical beam protective support structures wherein...

2007-01-26

2008-03-11

Allen, Stephone B. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S849000, C359S872000

Reexamination Certificate

active

07342703

ABSTRACT:
An arrangement for use with a micro-mechanical beam, in which a plurality of support structures are configured to directly attach to the micro-mechanical beam to increase bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness. At least two of the support structures are arranged to touch each upon reaching a predetermined bending action of the micro-mechanical beam and prevent a further bending action of the micro-mechanical beam, and at least two of the support structures are non-identical.

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