Method of passivating a micromechanical device within a hermetic

Details Method of passivating a micromechanical device within a hermetic Method of passivating a micromechanical device within a hermetic

1998-05-11

1999-08-10

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359900, 257704, G02B 2608

Patent

active

059367580

ABSTRACT:
A method of passivating a hermetically sealed micromechanical device (14) with a passivant (100). A predetermined quantity of the passivant (100) is placed within the cavity (54) of a lid (42) after the lid and package base (46) have been activated. Thereafter, by heating the package (10) including the passivant, the passivant will sublime within the hermetically sealed package (10) to provide a monolayer of passivant across the active surfaces of the micromechanical die (14). An improved hermetic seal is achieved since the passivant is sublimed after the laser weld process. In addition, the effectiveness of the passivation process is improved since the passivation is performed after the package is sealed, without the risk of any impurities entering into the package to degrade the effectiveness of the passivation.

REFERENCES:
patent: 5293511 (1994-03-01), Poradish et al.
Pending Application entitled "Micromechanical Device Including Time-Release Passivant", Serial Number 08/833,166 filed Apr.3, 1997, Inventors--Homer B. Klonis, et al.

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